JPH0514506Y2 - - Google Patents
Info
- Publication number
- JPH0514506Y2 JPH0514506Y2 JP1001585U JP1001585U JPH0514506Y2 JP H0514506 Y2 JPH0514506 Y2 JP H0514506Y2 JP 1001585 U JP1001585 U JP 1001585U JP 1001585 U JP1001585 U JP 1001585U JP H0514506 Y2 JPH0514506 Y2 JP H0514506Y2
- Authority
- JP
- Japan
- Prior art keywords
- core tube
- furnace core
- fluid
- heat treatment
- discharge pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004065 semiconductor Substances 0.000 claims description 23
- 238000010438 heat treatment Methods 0.000 claims description 20
- 239000012530 fluid Substances 0.000 claims description 19
- 238000004140 cleaning Methods 0.000 claims description 17
- 239000000126 substance Substances 0.000 claims description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 6
- 239000007789 gas Substances 0.000 description 15
- 235000012431 wafers Nutrition 0.000 description 14
- 238000000034 method Methods 0.000 description 10
- 238000001035 drying Methods 0.000 description 9
- 239000000428 dust Substances 0.000 description 8
- 230000006866 deterioration Effects 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- 238000003756 stirring Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005275 alloying Methods 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000012634 fragment Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
Landscapes
- Cleaning In General (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1001585U JPH0514506Y2 (en]) | 1985-01-29 | 1985-01-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1001585U JPH0514506Y2 (en]) | 1985-01-29 | 1985-01-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61127630U JPS61127630U (en]) | 1986-08-11 |
| JPH0514506Y2 true JPH0514506Y2 (en]) | 1993-04-19 |
Family
ID=30490807
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1001585U Expired - Lifetime JPH0514506Y2 (en]) | 1985-01-29 | 1985-01-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0514506Y2 (en]) |
-
1985
- 1985-01-29 JP JP1001585U patent/JPH0514506Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61127630U (en]) | 1986-08-11 |
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